{"id":2727,"date":"2014-06-23T10:39:09","date_gmt":"2014-06-23T09:39:09","guid":{"rendered":"https:\/\/www.ultraflux.net\/controle-debit-dazote-gazeux-process-fabrication-semi-conducteurs-2\/"},"modified":"2023-03-23T09:32:33","modified_gmt":"2023-03-23T08:32:33","slug":"flow-rate-measurement-of-gaseous-nitrogen","status":"publish","type":"page","link":"https:\/\/www.ultraflux.net\/en\/applications\/industry\/flow-rate-measurement-of-gaseous-nitrogen\/","title":{"rendered":"Flow rate measurement of gaseous nitrogen *"},"content":{"rendered":"

\n*\u00a0in the manufacturing process\u00a0for semi-conductors<\/p>\n<\/div>\n

BACKGROUND<\/div>

\nFlow rate measurement of ultra pure nitrogen on the production line for semi-conductors. Ultra pure nitrogen is used to remove impurities following the silicon etching process performed on high frequency integrated circuits intended for telephone applications.<\/p>\n<\/div><\/div><\/div>\n

DESCRIPTION OF THE APPLICATION<\/div>

\nThe measurements must be performed with a maximum pressure of 7 bars, at a maximum gross flow rate of 5m3<\/sup>\/hr. To adapt quickly to the gas network to be measured, “Swagelock” quick-fit connections are used. This measurement must have a minimum loss of pressure and present no risk whatsoever in terms of contamination of the gas.<\/p>\n<\/div><\/div><\/div>\n

EQUIPMENT USED<\/div>
<\/p>\n\n\n\n\n\n
Minisonic II converter<\/td>\nPipe-spool measurement<\/td>\n<\/tr>\n
\"\"<\/a><\/td>\n\"\"<\/a><\/td>\n<\/tr>\n
Minisonic II converter<\/a><\/td>\nCustom-made for the client, it consists of a stainless steel body with an inner diameter of \u00be”, in which 500KHz probes are inserted.<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n

\n<\/div><\/div><\/div>\n

RESULTS<\/div>

\nFitting in reflex configuration enables the acoustic path to be increased whilst minimising the straight lengths, which means that greater accuracy can be achieved, complying with the specifications of the customer (see COFRAC results below).<\/p>\n

Results of the COFRAC calibration tests performed at CETIAT<\/span><\/p>\n\n\n\n\n\n\n\n\n\n\n\n
Qmr (kg\/s)<\/td>\n\u03c1 (kg\/m3<\/sup>)<\/td>\n\u00a0Qvr (dm3<\/sup>\/h)<\/td>\nQvd (dm3<\/sup>\/h)<\/td>\n% error<\/td>\nUpstream absolute pressure (Pa)<\/td>\n<\/tr>\n
\u00a02,049e<\/sup>-3<\/td>\n\u00a07,036<\/td>\n\u00a01048,4<\/td>\n\u00a01047<\/td>\n\u00a0-0,1<\/td>\n\u00a0597251<\/td>\n<\/tr>\n
\u00a02,066e<\/sup>-3<\/td>\n\u00a07,033<\/td>\n\u00a01057,5<\/td>\n\u00a01056<\/td>\n\u00a0-0,1<\/td>\n\u00a0597123<\/td>\n<\/tr>\n
\u00a03,933e<\/sup>-3<\/td>\n\u00a07,027<\/td>\n\u00a02015<\/td>\n\u00a02011<\/td>\n\u00a0-0,2<\/td>\n\u00a0596623<\/td>\n<\/tr>\n
\u00a03,961e<\/sup>-3<\/td>\n\u00a07,025<\/td>\n\u00a02030<\/td>\n\u00a02036<\/td>\n\u00a0 0,3<\/td>\n\u00a0596349<\/td>\n<\/tr>\n
\u00a06,867e<\/sup>-3<\/td>\n\u00a07,010<\/td>\n\u00a03527<\/td>\n\u00a03533<\/td>\n\u00a0 0,2<\/td>\n\u00a0595108<\/td>\n<\/tr>\n
\u00a06,926e<\/sup>-3<\/td>\n\u00a07,015<\/td>\n\u00a03554<\/td>\n\u00a03546<\/td>\n\u00a0-0,2<\/td>\n\u00a0595688<\/td>\n<\/tr>\n
\u00a09,630e<\/sup>-3<\/td>\n\u00a06,997<\/td>\n\u00a04955<\/td>\n\u00a04978<\/td>\n\u00a0 0,5<\/td>\n\u00a0593988<\/td>\n<\/tr>\n
\u00a09,678e<\/sup>-3<\/td>\n\u00a07,001<\/td>\n\u00a04977<\/td>\n\u00a04974<\/td>\n\u00a0-0,1<\/td>\n\u00a0594588<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n

Key<\/span>:
\nQmr: reference mass flow
\np: density
\nQvr: reference volumetric flow
\nQvd: flow meter volumetric flow<\/p>\n<\/div><\/div><\/div>\n

ADVANTAGES<\/div>

\nThe mechanical study, Ultraflux’s expertise in hydraulics and the care taken in producing the sleeve ensured that there was virtually no loss of pressure.<\/p>\n<\/div><\/div><\/div>\n","protected":false},"excerpt":{"rendered":"","protected":false},"author":3,"featured_media":11505,"parent":5745,"menu_order":0,"comment_status":"closed","ping_status":"closed","template":"","meta":[],"acf":[],"yoast_head":"\nFlow rate measurement of gaseous nitrogen | Ultraflux<\/title>\n<meta name=\"description\" content=\"Use of a reliable and efficient solution : Ultraflux converter and pipe-spool measurement. 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